Try once TMAH containing dissolved Si and ammonium peroxodisulfate.
unfortunately the oxide etching rate isn't very high (~10nm/hour),
but at least it doesn't attack your aluminium.

regards
tobias

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of bobo
Sent: Thursday, May 15, 2003 6:31 AM
To: [email protected]
Subject: [mems-talk] Etching SiO2 without affecting Aluminum


Dear all,
does anyone knows what wet etchant can etching silicon dioxide without
etching aluminum at the same time?   Thanks.
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