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MEMSnet Home: MEMS-Talk: Etching SiO2 without affecting Aluminum
Etching SiO2 without affecting Aluminum
2003-05-15
bobo
2003-05-15
Tobias Kramer
2003-05-15
beaton@npphotonics (Bill Eaton)
2003-05-15
Kirt & Erika Zipf-Williams
2003-05-15
Mark McNie
2003-05-16
Neal Ricks
2003-05-15
Pavel Neuzil
2003-05-15
Dave Kharas
2003-05-16
kin@astri.org
2003-05-16
David Springer
Etching SiO2 without affecting Aluminum
kin@astri.org
2003-05-16
You can try 777 pad etch solution. 777 pad etch solution is
designed mainly for etching glass without etching Al. It's
active ingradient is ammonium floride so be careful!

> Dear all,
> does anyone knows what wet etchant can etching silicon
> dioxide without etching aluminum at the same time?
> Thanks. _______________________________________________
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Best Regards,
Kin


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