Well, if you can get a good (pinhole-free) layer of silicon deposited onto
the Pyrex, this would then fuction as a good mask for the BOE and can also
be used as the intermediate layer for bonding. You could then use anodic
bonding to bond the wafers together. If you are pattrerning both wafers
however, then you would have to strip the silicon from one of the wafers to
be able to do the anodic bonding. An alternative for the silicon-layer would
be a Cr/Au-layer, which is also often used.
Succes,
Jason
___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl
___________________________________________________________
-----Original Message-----
From: Sooje Cho [mailto:[email protected]]
Sent: donderdag 28 augustus 2003 15:02
To: [email protected]
Subject: [mems-talk] Glass-Glass bonding
>Hello all,
> I am interested in bonding two glass wafers (one can be pyrex)
together.
prior to bonding i etch a microchannel into of the substrates using
BOE.
Does anyone know of materials that can be used as a masking material for
BOE etching and as an intermediate layer for bonding?I know that
aluminium
can be used as a intermediate layer for bonding but it does not hold up
to
the BOE etching. I am also will to try gold-gold thermocompression
bonding
but am not familar with the process so if someone also has information
on
this bonding method it will be greatly appreciated.
>
>Thank you.
>Ryan
Hi Ryan,
If the glass you etched was not properly surface treated(or cleaned),
the adhesion could be improper. So damage of the glass under photoresist
would
be higher and it will attack your glass.
Chromium thin film will be helpful to your etching process.
If the etchant is stirred or sprayed, deep channel can be formed.
I think bonding the Au layer to Au layer needs high temperature or
special technique like ultrasonic.
If you use eutectic bonding, more easily you can bond the glasses at low
temperature.
Or other metal pastes(like silver paste) can be used for bonding.
If you need insulating, glass pastes are to be used.
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