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MEMSnet Home: MEMS-Talk: Lift-Off
Lift-Off
2003-12-03
Krueger, Bernd (Unaxis Optics BZ)
2003-12-04
Jim Beall
2003-12-04
Shane Jones
2003-12-04
Neal Ricks
2003-12-05
ShuTing Hsu
2003-12-05
Karin Buchholz
2003-12-05
William Lanford-Crick
2003-12-04
Michael D Martin
Lift-Off
Shane Jones
2003-12-04
Dear Bernd,

Brewer Science offers a material call PiRL that works quite well for metal
lift-off.

You can find information on PiRL at
http://www.brewerscience.com/sm/sm_tech_info.html .

Regards,
Shane

"Krueger, Bernd (Unaxis Optics BZ)" wrote:

> Dear All,
>
> does anybody has experience in a metal-lift-off-process? I am searching for
> a resist working fine for soft metal with a thickness of about 300nm. May be
> you can advise me either negative or positive resists.
>
> I would appreciate any help,
> Thanks in advance,
>
> Bernd Krueger
>
> >       Manager Engineering, OPO
> >       mailto:bernd.krueger@unaxis.com
> >
> >       Unaxis Balzers Ltd.
> >       Division Optics
> >       P.O. Box 1000
> >       FL-9496 Balzers / Liechtenstein
> >       Tel.  +423 / 388 4932
> >       Fax. +423 / 388 5185
> >
> >       Unaxis Optics -
> >       the future of Balzers Thin Films
> >
> >       http://www.optics.unaxis.com
> >
>
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