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MEMSnet Home: MEMS-Talk: Lift-Off
Lift-Off
2003-12-03
Krueger, Bernd (Unaxis Optics BZ)
2003-12-04
Jim Beall
2003-12-04
Shane Jones
2003-12-04
Neal Ricks
2003-12-05
ShuTing Hsu
2003-12-05
Karin Buchholz
2003-12-05
William Lanford-Crick
2003-12-04
Michael D Martin
Lift-Off
Michael D Martin
2003-12-04
Try 1813 lor 1827 from Clarient with toluene or chlorobenzene

-Mike


>>> bernd.krueger@unaxis.com 12/03/03 11:59 AM >>>
Dear All,

does anybody has experience in a metal-lift-off-process? I am searching
for
a resist working fine for soft metal with a thickness of about 300nm.
May be
you can advise me either negative or positive resists.

I would appreciate any help,
Thanks in advance,

Bernd Krueger


>       Manager Engineering, OPO
>       mailto:bernd.krueger@unaxis.com
>
>       Unaxis Balzers Ltd.
>       Division Optics
>       P.O. Box 1000
>       FL-9496 Balzers / Liechtenstein
>       Tel.  +423 / 388 4932
>       Fax. +423 / 388 5185
>
>       Unaxis Optics -
>       the future of Balzers Thin Films
>
>       http://www.optics.unaxis.com
>



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