Hi Bernd,

we use the Microposit S1818 for Lift-off, it is quite thick (the last
two numbers are related to the thickness, so the S1805 is much thinner
at the same spin rate) p.e.the S1818 is arond 1.6 µm @ 6000 rpm, 40s. To
get an undercut you can also try to put the samples 15 min in
Chlorobenzene after the softbake and exposure before the development.
(Chlorobenzene is tumourigenic, so use a well ventilated place and
prevent Daylight exposure during the 15 min, p.e. by aluminum Foil)

Good luck,

Karin


Krueger, Bernd (Unaxis Optics BZ) schrieb:

>Dear All,
>
>does anybody has experience in a metal-lift-off-process? I am searching for
>a resist working fine for soft metal with a thickness of about 300nm. May be
>you can advise me either negative or positive resists.
>
>I would appreciate any help,
>Thanks in advance,
>
>Bernd Krueger
>

--
Dipl.-Ing. Karin Buchholz

Walter Schottky Institut
Technische Universitaet Muenchen
email: [email protected]