I'm using SU-8 2005.
I soft bake at 65C_540S, exposure dose is 60mJ and post exposure bake at
Recently I encounter a problem where, after undergone gold plating process,
photoresist residue remains.
My stripping(remover PG) process is at 65C for an hour followed by acetone
bath in ultrasonic.
My plating temperature is about 45C for 25minutes.
I tried to strip in remover PG for another 30minutes but nothing seemed to
I had tried using the same condition previously and did not encounter this
I need some advice or comments on this.
Thanks a lot in advance.
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