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Micro Electro Mechanical Actuator Arrays
Web Pages of Karl Böhringer contain information, papers, and animations about manipulation strategies with microfabricat...
Micro Instrumentation Research and Instructional Laboratories
At the University of Utah
Micro Mechanical Devices Group (MicMec)
Publications and Dissertations http://utep.el.utwente.nl/tt/publications/index.html of the Micro Mechanical Devices Grou...
Electrical, Magnetic, Thermal, Optical,Chemical & Smart Structures, by Massood Tabib-Azar/Harcover/Published 1997
Microcantilevers for Atomic Force Microscope Data Storage
Benjamin W. Chui/Hardcover/Published 1998. Microcantilevers for Atomic Force Microscope Data Storage describes a resear...
MicroChem Corp. (MCC) develops, manufactures, sells, and supports specialty niche chemicals for semiconductor/IC, thin f...
A newsletter covering all of the technologies used for projection and virtual display based applications, including MEMS...
MicroElectromagnetics Device Group at the University of Texas
Information on research conducted at The University of Texas at Austin by Dr. Dean P. Neikirk into optical pressure sens...
Microelectronics Center, Technical University of Denmark
Has 7 research groups working with different aspects of MEMS, from nanoscience to BCMS and MOEMS.
microFAB Bremen GmbH
Provides MEMS foundry services for large and small volumes (6" and 4" wafer processing). Applied technologies are bulk- ...
Introductions to MEMS