| - Advanced Controls and Microsystems Laboratory, University of Minnesota
- ACML is a research team at the University of Minnesota
specializing in MEMS sensor design and fabrication. We are trying to
develop new sensing principles by using control theory as an enabling
technology. Our expertise lies in the area of applying advanced control
algorithms on in-house fabricated MEMS devices. Some of the completed
and ongoing projects include MEMS 2D electrostatic actuators that can be
actuated inside the pull-in range by applying nonlinear controls, a MEMS
absolute angle measurement sensor design, fabrication and
implementation, wireless MEMS acoustic sensors and MEMS sensor SAW
device integration for wireless sensors.
- Advanced Process Systems
- Advanced Process Systems represents specialized equipment for R&D through production including Meco electro-deposition of photo resist wafer coater
for conformal resist coating on high topography and deep cavities, GnP CMP systems with insitu friction force monitoring system for coupons, 4-6-8 inch wafers. Laurier FC die bonders with (.5um) placement accuracy for MEMS, Meco electroless UBM wafer plater and SRI International's new R&D Fab for MEMS, optoelectronics & 3D advanced packaging.
- AMICOM
Advanced MEMS for RF and MillimeterWave
Communications
This Network of Excellence aims to create a European Virtual Institute
for developing Smart MEMS microsystems for advanced communications. It
regroups 25 partners from 14 countries.
- Bennington Microtechnology Center
- Get microsystems from the laboratory to the market. A pilot
production facility specializing in the assembly and packaging of
integrated microsystems
- Brigham Young University
- Includes the Multidisciplinary
Microsystem Design and Integration Group http://research.et.byu.edu/mmidi/
- BTL Fellows Inc.
- BTL Fellows is a company that does applied Research and Development
based on an extensive intellectual property base, including: MEMS Plasma
Displays ; Metal-Silicide Contacts and Schottky Diodes; Ti-Pt-Au
metallization; Plasma Etching; Schottky Source and Drain MOSFETs; Air
Bridges and high-reliability MMIC devices. Cooperative development with
Profs. Fiory and Ravindra allows access to the large-scale resources of
NJIT.
- Caltech Micromachining Laboratory
- The Micromachining Laboratory's research interests include MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science. Successfully developed MEMS devices in Dr. Tai's lab include pressure sensors, shear-stress sensors, hot-wire anemometers, magnetic actuators, microphones, microvalves, micromotors, and so on. System-level MEMS research projects include integrated M3 (microelectronics + microsensors + microactuators) drag-reduction smart surface, flexible smart skin for the control unmanned aerial vehicles, and micro fluid delivery systems. Dr. Tai is also interested in MEMS sciences such as MEMS material (mechanical and thermal) properties, micro fluid mechanics, and micro/nano processing issues.
- CSEM Swiss Center for Electronics and Microtechnologies, Inc.
- CSEM SA, the Swiss Center for Electronics and Microtechnology, is a privately held, knowledge-based company carrying out:
- Applied research work
- Product development
- Prototype and low-volume production.
CSEM is mainly active in the fields of micro/nanotechnology, microelectronics, systems engineering, information and communication technologies. - Delft Institute of Microelectronics and Submicron Technology (DIMES), Delft University, The Netherlands
- Dimes is the Dutch national center for research and education on
silicon-based micro-electronics.
- Draper Laboratory
- Draper Laboratory, a R&D organization, currently has major MEMS efforts in inertial sensing, RF devices for communications, nanotechnology and microfluidics.
- Fraunhofer ISiT, Itsehoe Germany
- The Fraunhofer-Institut für Siliziumtechnologie (ISIT), Itzehoe, works on design, development and production of microelectronic components as well as on microsensors, microactuators and other components for microsystems technology. All devices of this kind can be delivered either being prototypes or customer specific series.
- Indian Institute of Technology,Bombay
- Delhi is an autonomous statutory organisation functioning within the "Institutes of Technology Act" as amended by "The Institutes of Technology (Amendent) Act, 1963". The seven Indian Institutes of Technology (others being at Bombay, Kanpur, Kharagpur, Madras and Guwahati Roorkee) are administered centrally by the IIT Council, an apex body established by the Government of India to co-ordinate activities of these Institutes. The Minister for Human Resource Development of the Government of India is the Chairman of the Council. Each Institute of Technology has a Board of Governors responsible for its overall administration and control. Prof. V S Ramamurthy is the Chairman of the Board of Governors of this Institute.
- Institute for Defense Analyses (IDA)
- IDA MEMS Technology Transition. This web site provides a resource for
contractors to locate, evaluate and initiate MEMS insertion
opportunities within DoD.
- Institute of Microtechnology Mainz
- As a partner for industrial companies and research institutions, we concentrate our activities on developing microdevices and systems for our customer's specific needs. Benefiting from this are companies from the fields of chemicals and pharmaceuticals, personal care, food industries, energy production, biotechnology, analytics, diagnostics, medical technology and sensor development. Our interdisciplinary teams of experts work out innovative solutions in close co-operation with the customer in order to open up market opportunities and new areas of business for them.
- Karl Bohringer, et al Micro Electro Mechanical Actuator Arrays
- Our actuators are based on microfabricated torsional resonators [5], rectangular grids etched out of single-crystal silicon [6] and suspended by two rods that act as torsional springs. When an AC voltage is applied between grid and adjacent electrodes, the grid oscillates at resonance frequencies in the high kHz range. The edges of the grid reach deflections of several micrometers.
- Karlsruhe Research Center
- Forschungszentrum Karlsruhe is one of the biggest science and engineering research institutions in Europe and funded jointly by the Federal Republic of Germany and the State of Baden-Wuerttemberg.
Its research and development program is embedded in the superordinate program structure of the Hermann von Helmholtz Association of National Research Centers and concentrates on the five research areas of Structure of Matter, Earth and Environment, Health, Energy, and Key Technologies.
- Liu Research Group
- The Liu Research (MASS) group at the University of Illinois at Urbana-Champaign performs groundbreaking research in all aspects of the emerging technology of Microelectromechanical Systems (MEMS). This includes microfluidics, bioMEMS, optical MEMS, polymer MEMS, photonics, nanolithography, RF MEMS, CAD, simulation, advanced sensors, and basic fabrication. We take designs from "substrates to systems" and perform all fabrication locally at the UIUC Micro and Nanotechnology Laboratory. The group is organized under the Department of Electrical and Computer Engineering and headed by Dr. Chang Liu.
- M2T - Microwave Microsystems Technology
- R&D on RF MEMS. Technology, Design and Test for microwave and millimeter wave
MEMS: membrane supported filters and antennas, switches, phase shifters,
magnetically tunable resonators.
- MEMS / Smart Matter Research
- At Xerox PARC http://www.parc.xerox.com
- MEMS program at Northeastern University
- The mission of this program is to investigate and apply methods and
processes that support the fabrication of devices with specific commercial
applications in mind and to train students in processes and procedures that are
encountered in industry.
- MEMS Research at Case Western Reserve University
- Microelectromechanical Systems (MEMS) research at Case Western Reserve
University is an interdisciplinary effort comprising faculty, staff, visiting
scholars, and students from four academic departments. Our group brings
together experts in all facets of MEMS -- design, modeling, fabrication,
materials, devices (sensors, actuators, and electronics), and applications --
to address the critical scientific and technological issues for advancing MEMS.
- MESA Research Institute of Twente University.
- MESA+ is one of the largest nanotechnology research institutes in the world, delivering competitive and successful high quality research. It uses a unique structure, which unites scientific disciplines, and builds fruitful international cooperation to excel in science and education. MESA+ has created a perfect habitat for start-ups in the micro- and nano-industry to establish and to mature.
- MicMec (Micro Mechanical Devices Group) of the University of Twente, The Netherlands
- Conducted by Professor M. Elwenspoek, MicMec is part of the MESA
Research Institute at the University of Twente, The Netherlands. It is
one of the leading groups in the world in the field of MicroSystem Technology
(MST) in general and MEMS in particular.
- Micro Instrumentation Research and Instructional Laboratories
- At the University of Utah
- MicroElectromagnetics Device Group at the University of Texas
- Information on research conducted at The University of Texas at Austin by
Dr. Dean P. Neikirk into optical pressure sensors, magnetic proximity sensors,
and the use of MEMS technology for "smart" mechanical bearings can be found
here.
- Microelectronics Center, Technical University of Denmark
-
Has 7 research groups working with different aspects of MEMS, from
nanoscience to BCMS and MOEMS.
- Microsensor and Actuator Technology (MAT), Berlin
- The Microsensor & Actuator Technology Berlin (MAT) is part of the
research unit "Microperipheric Technologies" of the
Technical University of Berlin
http://www.tu-berlin.de and
was founded in 1987.
Prof. Dr.-Ing. E. Obermeier
http://www-mat.ee.tu-berlin.de/staff/e_obermeier.html
is the head of the MAT. Today more than 30 research
scientists http://www-mat.ee.tu-berlin.de/staff/personen.html
are working on the field of sensor and actuator
development. Main topics are the development and realization of
sensors for measurement of pressure, force, acceleration, temperature,
humidity, gas flow and gas concentration. Modern computer aided design
methods like FEA
http://www-mat.ee.tu-berlin.de/service/simulation.html
are used to optimize the sensor characteristic.
The cleanroom facilities
http://www-mat.ee.tu-berlin.de/service/simulation.html
include standard CMOS processes and numerous special
processes, e.g. anisotropic etching, electrochemical etching and anodic bonding. Computer controlled test
systems are used to characterize the devices.
- Microsystems Center Bremen (MCB)
-
The Microsystems Center Bremen (MCB) is an R&D
centre providing services in the fields of microsystems,
microelectronics, power semiconductors and optoelectronics.
Its main focus is in the modelling, simulation,
development and manufacturing of micro systems and the design
of analogue and digital circuits, in particular for biomedical,
automotive and environmental applications. The technologies
available at MCB range from silicon and special material micro
structuring over semiconductor epitaxy, micro forming and
additive techniques to assembly technologies and micro
components packaging.
- MIT Microsystems Technology Laboratories
- Microsystems Technology Laboratories (MTL) is an interdepartmental laboratory that supports Microsystems research encompassing work in circuits and systems, MEMS, electronic and photonic devices, and molecular and nanotechnology. Our research is enabled by a set of shared experimental facilities, as well as a vibrant industrial consortium. Annually, MTL supports the research of 350 students and staff who are sponsored by contracted research of more than $40M.
- NanoMEMS Research, LLC
-
RF MEMS and nanotechnology research, consulting and education. RFIC
design and RF device modeling. CMOS and BiCMOS RF MEMS design. Technical
assistance to entities developing RandD proposals. Technical assessment
of business plans and opportunities on behalf of entrepreneurs or
venture capital firms.
- Nanorobotics Control Design and 3D Simulation
- A new approach within advanced graphics simulations is presented for
the problem of nano-assembly automation and its application for
medicine. The problem under study concentrates its main focus on
nanorobot control design for assembly manipulation and the use of
evolutionary agents as a suitable way to enable the robustness on
the proposed model.
- NASA Space Instrument and Sensing Technology
- Micro-Instrument Technology Program at NASA
- National Institute of Standards and Technology
From automated teller machines and atomic clocks to mammograms and semiconductors, innumerable products and services rely in some way on technology, measurement, and standards provided by the National Institute of Standards and Technology.
Founded in 1901, NIST is a non-regulatory federal agency within the U.S. Commerce Department's Technology Administration. NIST's mission is to promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technology in ways that enhance economic security and improve our quality of life. - National MEMS Design centre
- Design of MEMS devices ranging from Accelerometers to RF MEMS.
- Northeastern University MEMS program
- The Microfabrication Laboratory (MFL) supports graduate and undergraduate education by providing access to microfabrication technology. The laboratory conducts microfabrication-related research, primarily in the area of microelectromechanical systems (MEMS). In MEMS, the laboratory's areas of expertise include surface micromachining, with an emphasis on metal surface micromachining using the Northeastern University MEtal Micromachining (NUMEM) process and bulk micromachining including anisotropic etching and alloy bonding.
- NYS Center for Advanced Thin Film Technology - University of Albany
- The College of Nanoscale Science and Engineering of the University at Albany is the first college in the world dedicated to the research, development and deployment of innovative nanoscience, nanoengineering, nanobioscience and nanoeconomics concepts. CNSE's Albany NanoTech complex - a $3.5 billion, 450,000-square-foot facility that has attracted over 250 global corporate partners - is the most advanced research complex of its kind at any university in the world.
- Optonor SA, Norway.
- High quality and cost effective solutions based on
Interferometry - Shearography -
Holography - Structured illumination
- SAMLAB
SAMLAB, standing for the Sensors, Actuators and Microsystems Laboratory, is part of the Institute of Microtechnology (IMT) of the University of Neuchâtel. SAMLAB is located on the premises of the technological center at Rue Jaquet-Droz 1, together with the "Centre Suisse d'Electronique et de Microtechique SA" (CSEM), as well as the newly established incubator NEODE.
SAMLAB has well-established expertise in micro- and nanotechnology. Multi-disciplinary research activities have encompassed many diverse applications from the life sciences to telecommunications. Microfabricated probes for atomic force and near field optical microscopy, micromechanical devices for optical fibre networks, discrete microsensors and miniaturised chemical analysis systems for environmental and clinical analyses, and micro-instrumentation for space research are examples of SAMLAB current research activities. - The Aerospace Corporation
- Since 1960 The Aerospace Corporation has operated a federally funded research and development center in support of national-security, civil and commercial space programs. We're applying the leading technologies and the brightest minds in the industry to meet the challenges of space.
- The Berkeley Sensor and Actuator Center
-
The Berkeley Sensor and Actuator Center (BSAC) is a NSF/Industry/University
cooperative research center funded by the National Science Foundation and a
consortium of corporations and government agencies. Since its foundation in
1986, BSAC has been devoted to research on sensors and miniature moving
mechanical elements that take advantage of the remarkable progress made in IC
technology.
- The Carnegie Mellon University MEMS Laboratory
- The CMU MEMS Laboratory is developing miniature sensor and actuator
systems made using batch-fabrication processes, especially
integrated-circuit fabrication processes. This lab. is associated
jointly with the Department of
Electrical and Computer Engineering
(ECE) http://www.ece.cmu.edu/
the Robotics Institute
http://www.ri.cmu.edu/
part of the School of Computer Science
http://www.cs.cmu.edu/ and the
Institute for Complex Engineered
Systems (ICES) http://www.ices.cmu.edu at Carnegie Mellon University http://www.cmu.edu/
- The Catholic University of Leuven, Belgium
-
Information about microsystem technology work in general, and
Micro Electro Discharge Machining in particular.
- The Microsystems Technology Laboratories (MTL) at MIT
- This page centralizes information about the FAB's and research going on at
the MTL at MIT, including research on MEMS at MIT and
elsewhere. There
is also a page announcing the next <a
Boston Area MEMS seminar
(BAMS) http://www-mtl.mit.edu/BAMS/seminar.html
- The Stanford Center for Design Research (CDR)
-
The Stanford CDR maintains information on a wide variety of research
projects that include collaborative design, national studies on engineering
education, and computational agent infrastructures for distributed
collaborative engineering. There is also a DesignNet directory of design
research services.
- TIMA Laboratory, Grenoble, France.
- Tufts University, Electro-Optics Tech Center
- UCLA Micromanufacturing Laboratory
- University of California Santa Barbara
- Has two research groups, led by Prof. Noel MacDonald
http://www.engr.ucsb.edu/~memsucsb/
and Kim Turner http://www.engr.ucsb.edu/~tmems/
- University of Illinois at Urbana-Champaign,MEMS at UIUC
- University of Southampton Microelectronics Centre MEMS Group
-
The Microelectronics Center at Southampton University has been in existence
now for about 20 years. Sensors research has always been a key point
of our activity and in the last 15 years micromachined "MEMS" devices
have formed an important research area. We have made a variety of
micromachined devices in collaboration with other University
researchers and Industry.
- University of Southern California
-
One major current thrust is to develop
various acoustic MEMS using piezoelectric films or substrates.
- University of Stanford, Transducers Lab
- University of Texas MicroElectromagnetics Device Group
- Xerox PARC
|
MEMS and Nanotechnology Clearinghouse