| - Advanced Controls and Microsystems Laboratory, University of Minnesota
- ACML is a research team at the University of Minnesota
specializing in MEMS sensor design and fabrication. We are trying to
develop new sensing principles by using control theory as an enabling
technology. Our expertise lies in the area of applying advanced control
algorithms on in-house fabricated MEMS devices. Some of the completed
and ongoing projects include MEMS 2D electrostatic actuators that can be
actuated inside the pull-in range by applying nonlinear controls, a MEMS
absolute angle measurement sensor design, fabrication and
implementation, wireless MEMS acoustic sensors and MEMS sensor SAW
device integration for wireless sensors.
- Brigham Young University
- Includes the Multidisciplinary
Microsystem Design and Integration Group http://research.et.byu.edu/mmidi/
- BTL Fellows Inc.
- BTL Fellows is a company that does applied Research and Development
based on an extensive intellectual property base, including: MEMS Plasma
Displays ; Metal-Silicide Contacts and Schottky Diodes; Ti-Pt-Au
metallization; Plasma Etching; Schottky Source and Drain MOSFETs; Air
Bridges and high-reliability MMIC devices. Cooperative development with
Profs. Fiory and Ravindra allows access to the large-scale resources of
NJIT.
- Caltech Micromachining Laboratory
- The Micromachining Laboratory's research interests include MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science. Successfully developed MEMS devices in Dr. Tai's lab include pressure sensors, shear-stress sensors, hot-wire anemometers, magnetic actuators, microphones, microvalves, micromotors, and so on. System-level MEMS research projects include integrated M3 (microelectronics + microsensors + microactuators) drag-reduction smart surface, flexible smart skin for the control unmanned aerial vehicles, and micro fluid delivery systems. Dr. Tai is also interested in MEMS sciences such as MEMS material (mechanical and thermal) properties, micro fluid mechanics, and micro/nano processing issues.
- Draper Laboratory
- Draper Laboratory, a R&D organization, currently has major MEMS efforts in inertial sensing, RF devices for communications, nanotechnology and microfluidics.
- Institute for Defense Analyses (IDA)
- IDA MEMS Technology Transition. This web site provides a resource for
contractors to locate, evaluate and initiate MEMS insertion
opportunities within DoD.
- Karl Bohringer, et al Micro Electro Mechanical Actuator Arrays
- Our actuators are based on microfabricated torsional resonators [5], rectangular grids etched out of single-crystal silicon [6] and suspended by two rods that act as torsional springs. When an AC voltage is applied between grid and adjacent electrodes, the grid oscillates at resonance frequencies in the high kHz range. The edges of the grid reach deflections of several micrometers.
- MEMS / Smart Matter Research
- At Xerox PARC http://www.parc.xerox.com
- MEMS program at Northeastern University
- The mission of this program is to investigate and apply methods and
processes that support the fabrication of devices with specific commercial
applications in mind and to train students in processes and procedures that are
encountered in industry.
- MEMS Research at Case Western Reserve University
- Microelectromechanical Systems (MEMS) research at Case Western Reserve
University is an interdisciplinary effort comprising faculty, staff, visiting
scholars, and students from four academic departments. Our group brings
together experts in all facets of MEMS -- design, modeling, fabrication,
materials, devices (sensors, actuators, and electronics), and applications --
to address the critical scientific and technological issues for advancing MEMS.
- Micro Instrumentation Research and Instructional Laboratories
- At the University of Utah
- MicroElectromagnetics Device Group at the University of Texas
- Information on research conducted at The University of Texas at Austin by
Dr. Dean P. Neikirk into optical pressure sensors, magnetic proximity sensors,
and the use of MEMS technology for "smart" mechanical bearings can be found
here.
- MIT Microsystems Technology Laboratories
- Microsystems Technology Laboratories (MTL) is an interdepartmental laboratory that supports Microsystems research encompassing work in circuits and systems, MEMS, electronic and photonic devices, and molecular and nanotechnology. Our research is enabled by a set of shared experimental facilities, as well as a vibrant industrial consortium. Annually, MTL supports the research of 350 students and staff who are sponsored by contracted research of more than $40M.
- NanoMEMS Research, LLC
-
RF MEMS and nanotechnology research, consulting and education. RFIC
design and RF device modeling. CMOS and BiCMOS RF MEMS design. Technical
assistance to entities developing RandD proposals. Technical assessment
of business plans and opportunities on behalf of entrepreneurs or
venture capital firms.
- NASA Space Instrument and Sensing Technology
- Micro-Instrument Technology Program at NASA
- National Institute of Standards and Technology
From automated teller machines and atomic clocks to mammograms and semiconductors, innumerable products and services rely in some way on technology, measurement, and standards provided by the National Institute of Standards and Technology.
Founded in 1901, NIST is a non-regulatory federal agency within the U.S. Commerce Department's Technology Administration. NIST's mission is to promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technology in ways that enhance economic security and improve our quality of life. - Northeastern University MEMS program
- The Microfabrication Laboratory (MFL) supports graduate and undergraduate education by providing access to microfabrication technology. The laboratory conducts microfabrication-related research, primarily in the area of microelectromechanical systems (MEMS). In MEMS, the laboratory's areas of expertise include surface micromachining, with an emphasis on metal surface micromachining using the Northeastern University MEtal Micromachining (NUMEM) process and bulk micromachining including anisotropic etching and alloy bonding.
- NYS Center for Advanced Thin Film Technology - University of Albany
- The College of Nanoscale Science and Engineering of the University at Albany is the first college in the world dedicated to the research, development and deployment of innovative nanoscience, nanoengineering, nanobioscience and nanoeconomics concepts. CNSE's Albany NanoTech complex - a $3.5 billion, 450,000-square-foot facility that has attracted over 250 global corporate partners - is the most advanced research complex of its kind at any university in the world.
- SAMLAB
SAMLAB, standing for the Sensors, Actuators and Microsystems Laboratory, is part of the Institute of Microtechnology (IMT) of the University of Neuchâtel. SAMLAB is located on the premises of the technological center at Rue Jaquet-Droz 1, together with the "Centre Suisse d'Electronique et de Microtechique SA" (CSEM), as well as the newly established incubator NEODE.
SAMLAB has well-established expertise in micro- and nanotechnology. Multi-disciplinary research activities have encompassed many diverse applications from the life sciences to telecommunications. Microfabricated probes for atomic force and near field optical microscopy, micromechanical devices for optical fibre networks, discrete microsensors and miniaturised chemical analysis systems for environmental and clinical analyses, and micro-instrumentation for space research are examples of SAMLAB current research activities. - The Aerospace Corporation
- Since 1960 The Aerospace Corporation has operated a federally funded research and development center in support of national-security, civil and commercial space programs. We're applying the leading technologies and the brightest minds in the industry to meet the challenges of space.
- The Berkeley Sensor and Actuator Center
-
The Berkeley Sensor and Actuator Center (BSAC) is a NSF/Industry/University
cooperative research center funded by the National Science Foundation and a
consortium of corporations and government agencies. Since its foundation in
1986, BSAC has been devoted to research on sensors and miniature moving
mechanical elements that take advantage of the remarkable progress made in IC
technology.
- The Carnegie Mellon University MEMS Laboratory
- The CMU MEMS Laboratory is developing miniature sensor and actuator
systems made using batch-fabrication processes, especially
integrated-circuit fabrication processes. This lab. is associated
jointly with the Department of
Electrical and Computer Engineering
(ECE) http://www.ece.cmu.edu/
the Robotics Institute
http://www.ri.cmu.edu/
part of the School of Computer Science
http://www.cs.cmu.edu/ and the
Institute for Complex Engineered
Systems (ICES) http://www.ices.cmu.edu at Carnegie Mellon University http://www.cmu.edu/
- The Microsystems Technology Laboratories (MTL) at MIT
- This page centralizes information about the FAB's and research going on at
the MTL at MIT, including research on MEMS at MIT and
elsewhere. There
is also a page announcing the next <a
Boston Area MEMS seminar
(BAMS) http://www-mtl.mit.edu/BAMS/seminar.html
- The Stanford Center for Design Research (CDR)
-
The Stanford CDR maintains information on a wide variety of research
projects that include collaborative design, national studies on engineering
education, and computational agent infrastructures for distributed
collaborative engineering. There is also a DesignNet directory of design
research services.
- Tufts University, Electro-Optics Tech Center
- UCLA Micromanufacturing Laboratory
- University of California Santa Barbara
- Has two research groups, led by Prof. Noel MacDonald
http://www.engr.ucsb.edu/~memsucsb/
and Kim Turner http://www.engr.ucsb.edu/~tmems/
- University of Illinois at Urbana-Champaign,MEMS at UIUC
- University of Southern California
-
One major current thrust is to develop
various acoustic MEMS using piezoelectric films or substrates.
- University of Stanford, Transducers Lab
- University of Texas MicroElectromagnetics Device Group
- Xerox PARC
|
MEMS and Nanotechnology Clearinghouse