| - allaboutMEMS
- An informative site sponsored by MEMSCAP.
- Beginner's Guide to MEMS Processing
- From memsnet.org.
- Cornell Micro Cinema
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Karl Bohringer, et al.
- Foundation of MEMS - Prentice Hall, Dr. Chang Liu
- A new book, written by Dr. Chang Liu, entitled "Foundation of MEMS" has been published.
Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and
mechanical engineering domains and by incorporating evolving microfabrication technology – all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking. ISBN: 0-13-147286-0
- Intelligent Motion Surfaces
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Demonstrations by Peter Will, Murilo Coutinho and Adam Cohen.
- Introduction to Microengineering
- by Danny Banks.
- MEMS Image Gallery
- From Sandia National Labs.
- Micro Electro Mechanical Actuator Arrays
- Web Pages of Karl Böhringer contain information, papers, and
animations about manipulation strategies with microfabricated actuator
arrays. The electrostatic actuators are fabricated in a
single-crystal silicon etching and metallization (SCREAM) process.
They were built in the National Nanofabrication Facility at Cornell
University.
- Southwest Center for Microsystems Education (SCME)
- The SCME is a National Science Foundation supported Advanced Technology Education regional center founded to promote public awareness of Microsystems technologies and to improve the educational capacity of the United States to produce Microsystems technologists. The SCME develops and disseminates educational modules and activity kits and sponsors several hands-on workshops annually to familiarize K-12, community college, and university faculty and counselors with the fabrication processes, technologies, and career paths available in the Microsystems field.
- What is MEMS?
-
From memsnet.org.
|
MEMS and Nanotechnology Clearinghouse