| - MEMS Exchange
- Fabrication Services
The MEMS and Nanotechnology Exchange coordinates a virtual fab, a
network of fabrication centers that lets our users draft process
sequences which are performed across the boundaries separating the
individual facilities. Our service is made available to the United
States community including commercial, academic, and government
organizations.
Contact us at engineering@mems-exchange.org - Advanced MicroSensors
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Offers design, development and volume manufacturing foundry services
for 3" and 6" wafer MEMS, MOEMS and thin film devices. Specialties
include CMOS-compatible processing, magnetic materials, high
aspect-ratio UV-LIGA microlithography, through-mask electrodeposition,
CMP, deep-silicon Bosch ICP etching, dry and wet release etching and
super-critical drying. AMS features a large, modern Class 100
cleanroom with Class 10 microlithographic coating.
- Advanced NanoStructures
- Non-standard nano/microfabrication, "gold contaminated" DRIE, PECVD, Litho, Metalization, Nano-imprinting, Wet etching.
- Advanced Process Systems
- Advanced Process Systems represents specialized equipment for R&D through production including Meco electro-deposition of photo resist wafer coater
for conformal resist coating on high topography and deep cavities, GnP CMP systems with insitu friction force monitoring system for coupons, 4-6-8 inch wafers. Laurier FC die bonders with (.5um) placement accuracy for MEMS, Meco electroless UBM wafer plater and SRI International's new R&D Fab for MEMS, optoelectronics & 3D advanced packaging.
- Allied Coatings
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Thin film deposition services.
- Amkor Technology, Inc.
- Amkor Technology is the world's leader in micro electronic packaging
technologies and the world's largest outsource provider of Micro
Electronic Mechanical Systems (MEMS) and Micro Optical Electronic
Mechanical Systems (MOEMS).
- Apogee Technology, Inc.
- Apogee Technology designs, develops, and markets Micro Electro
Mechanical Systems (MEMS) and analog & digital circuit designs for the
consumer, automotive, communications and medical markets.
- Applied MEMS
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Offers wafer, packaging and test/characterization foundry services for
fabless MEMS product vendors. We also design and manufacture
MEMS-based products including sensors, accelerometers and
micro-mirrors for a variety of applications.
- Aptek Industries
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CMP services.
- Bosch Sensortec GmbH
- Bosch Sensortec GmbH offers micro mechanic sensors (MEMS)
and their application for consumer electronics, medical technology,
security systems, logistics and Life Sciences, as well as specific
foundry services. The company, founded early in 2005, is one hundred
percent a subsidiary of Robert Bosch GmbH, the MEMS pioneer and the
largest manufacturer of automotive sensors worldwide.
- Boston Micromachines Corporation
- As an innovative designer and premier manufacturer of MEMS wavefront control
devices, Boston Micromachines offers a full line of micromachined deformable
mirrors (DMs) and reflective spatial light modulators (SLMs) that are
reliable, compact, and economical. Our high performance devices are
currently integral components in AO systems around the world. In addition to
our standard line, we also offer custom design-manufacturing services.
- Canadian Microelectronics Corporation (CMC)
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CMC is a not-for-profit organization established in 1984 to
provide industrial microelectronic technologies to Canadian universities,
both to facilitate world-class research and to ensure a strong source of
well-trained graduates. CMC is supported by contributions of technology,
services and cash from industry and by matching funding from the federal
Natural Sciences and Engineering Research Council. CMC's membership now
includes 36 universities and 20 industrial organizations.
One service we provide is a MEMS service called BEAMS, which
includes bulk and surface micromachining processes.
- CapiliX
- CapiliX is a supplier of microfluidic products and solutions based on
glass chip technology. We address the microfluidics needs of researchers
in the sectors of bio, pharma and water quality management. We provide
modular solutions focusing on increasing the efficiency and decreasing
reagent waste.
- Colibrys
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Offers medium-volume (100k/annum) production of custom and standard
components to diverse high value-added custom market applications
including: Navigation and Guidance, Telecommunications, Life Sciences,
Industrial Applications, and Foundry Services. Products range from
magnetic print heads, optical microlenses, circuits and components for
telecoms, to micro-optical illumination systems, mechanical
capacitative accelerometers and ionizing radiation detectors.
- Concept To Volume
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Offers customized solutions for your OEM products in the field of MEMS
technologies and Integrated Optics. C2V offers OEM Seamless
Microsystems Engineering (SME), from concept design to volume
production. Development, prototyping and pilot production are in-house
activities. Beginning with a concept, via development and prototyping,
SME also includes transfer from low to high volume production of
microsystems.
- Corning Intellisense
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Provides MEMS modeling, device
design, process development, volume manufacturing and final assembly. Our
expertise includes Silicon Micromachining, Software Tools for MEMS and
Integrated Optics.
- Cronos Integrated Microsystems
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Cronos manufactures MEMS components, primarily for communications
applications, using foundry services and proprietary MEMS devices.
- Delphi Delco Electronic Systems
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Can develop MEMS products for other companies and act
as a high-volume foundry for those products.
- Discovery Chip Ltd
- Discovery Chip aims to provide a low cost microfluidics consultancy
service combined with prototyping facilities and a rapid route to
commercialisation.
We hold extensive knowledge and experience of microfluidic
technologies enabling us to provide rapid development of ideas from
the concept stage to volume production.
This makes it feasible for small companies, institutions or
individuals who do not have the experience of microfluidics or the
necessary facilities to develop their ideas and apply the benefits of
microfluidics to them.
- Edge Embossing LLC
- Manufacturing of MEMS designs in plastic using high-fidelity
soft embossing
- Electronic Fluorocarbons LLC
- Supplies Ultra High Purity
(UHP) Fluorocarbons Gases to the Semiconductor and related industries. Primary
products are Halocarbon 14 (Tetrafluoromethane), Halocarbon 218
(Octafluoropropane) , Halocarbon C318 (Octafluorocyclobutane), Halocarbon 23
(Trifluoromethane) and Sulfur Hexafluoride (SF6). Other high purity
fluorocarbon gases and mixtures are also available.
- ELume Inc.
- ELume processes silicon,glass,ceramic,lithium niobate and flexible
substrates. We operate a class 10 foundry in the USA for 50-200 mm
wafers. Products include multi electrode arrays MEA.
We service the life,bio,neuro,pharmaceutical and drug discovery markets.
- GDSI
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Provides wafer backgrinding, wafer backside polishing, wafer stress
relief etch, wafer dicing, die inspection, die tape and reel and die
waffle packing services. Sells wafer grinding and wafer dicing
tapes as well.
- Haleos, Inc.
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(Formerly ACT MicroDevices.)
Maintains a full-service micro foundry that includes: highly
characterized thin film and optical coatings, solder and microwave
circuit metallization, and precision wet and dry etching. Specializes
in Silicon Optical Bench Fabrication, Bulk Micromachining, Low Stress
Nitrides, and Deep RIE of silicon, through both the Bosch process and the
cryogenic smooth sidewall process. Most of our services are available on
100mm, 125mm, 150mm (Thin Films on 200mm). Haleos can custom engineer
processes and has design and modeling expertise.
- Honeywell MEMSplus
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A MEMS foundry service located in Redmond,
Washington, Honeywell's services range from single process step fulfillment
to complete turnkey design through volume production.
- Hte Labs
- HTE Labs Provides Wafer Foundry, R&D support and Specialty Wafer Fab Processing to customers from semiconductors and microelectronic industry.
- Innovative Micro Technology
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A MEMS manufacturing company that offers services from design and
prototyping to process development and high-volume manufacturing, with
one of the largest 6" MEMS wafer fabs in the US.
- Integrated Sensing Systems Inc. (ISSYS)
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ISSYS provides a variety of foundry services for
4" diameter wafers, with an emphasis on high
quality and fast turnaround times. ISSYS'
services include single-step processing,
prototyping, full manufacturing and technical
consulting. Product development capabilities
include sensor design, electronics design,
packaging design, process development, and
manufacturing.
- Intelligent Micro Patterning LLC
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Offers design and processing services for MEMS devices, specializing
in the ability to process non-standard substrates and materials (such
as plastics, ceramics, and quartz) and maskless photolithography
capabilties.
- Laserod, Inc.
- Laserod is a Precision Micromachining Laser Job Shop with System
Integration: We scribe, drill, mark, and cut thin materials; plus
pattern ITO, and trim resistors. Our tolerances are to one micron and
laser cutting edge to 5 microns with cut or hole depth to 1,000 microns
on any material (except glass).
Specializing in silicon MEMS device cutting &
drilling by laser.
- LioniX
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Customer-specified development and production of microsystem/MEMS based
products, i.e. integrated optics and microfluidics for (OEM) customers
in Telecom, Industrial Process Control, Life Sciences and Space. LioniX
is the result of the joining of forces of Lion Photonix Technologies BV
(2001) and 3T Micro Systems Technology (1988) in 2002 and is
particularly experienced in integrated optics based telecom devices and
Lab-on-a-chip systems.
- MEMS Engineering and Material
- We provide fabrication services
ranging from lithography, etching, sputtering, wafer bonding, wafer plating, to
wafer dicing.
- Micralyne Inc.
- Micralyne develops and manufactures microfabricated and MEMS-based
components. Micralyne provides OEM manufacturing for several
industries including communications, automotive, and biomedical
applications. Its MEMS solutions include lab-on-a-chip devices,
sensors, and optical switch systems. Micralyne has developed
core competencies in several specialized fields
including micromachining, thin film technologies, microfluidics, and
associated characterization and assembly capabilities.
- microFAB Bremen GmbH
- Provides MEMS foundry services for large and small volumes (6" and 4" wafer processing). Applied technologies are bulk- and surface micromachining including Si deep trench etching (DRIE, Bosch Process), wafer bonding (anodic and fusion), PECVD and LPCVD thin film depositions (undoped poly Si, boron-doped poly Si, Si3N4, low-stress Si nitride, TEOS, LTO), sputtering of metals and electroplating.
- Micronit Microfluidics BV
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A company specialized in the rapid prototyping of microfluidic glass
and silicon devices. Micronit holds IP rights on IP generated at the
MESA+ research institute and offers prototyping services to customers
all over the world.
- Midwest MicroDevices, LLC
- MMD has no internal products, providing the
customer with complete confidence that intellectual
property is secure and will never find its way into
other competing products.
MMD targets emerging to medium production
volumes ranging from thousands to a few million
devices per application.
- Mimotec
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Provides microparts and micromolds, produces its own photoresist
(SU-8) and has UV-LIGA competence.
- MOSIS
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The MOSIS Fabrication Service of USC/Information Sciences
Institute is a prototyping service for standard cell and full-custom
VLSI circuit development. MOSIS is in the process of expanding their
service to include MEMS devices.
- Nano and Micro Technology Consultants
- We are an R&D firm specialized in design, prototyping
and manufacturing of various MEMS/NEMS systems,
devices and components.
- Nascatec GmbH
- Our core business ranges from developing and prototyping to producing SPM sensors, SNOM sensors microgrippers and micromechanics for application in R&D, characterization of surface topography and process control.
- NetMotion, Inc.
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Die and mask handling tools, vacuum wands, tweezers, vacuum pumps, tubing,
and other precision parts Handling kits, ESD safe products and tweezers
for 300mm wafer handling are also available.
- New Jersey Institute of Technology
- The Microelectronics Fabrication Center provides design, fabrication,
and fast-prototyping services of MEMS, BioMEMS, biometrics sensor
arrays, chemical sensors, and microfluidic devices. Class-10 and
Class-1000 cleanrooms are equipped for processing of 3-, 4-, 5-, and
6-inch wafers. Using cutting-edge microfabrication technologies MFC acts
as an interface between industry and academia. Our team of engineers
meets all requirements of excellence in the partnership with industry.
- Norcada Inc.
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Provides design and fabrication services of MEMS devices in a number
of application areas including SiOB for fiber optic communications,
and microfluidic devices for bioanalysis.
- Ohio MEMSNet
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The purpose of this project is to establish a statewide fabrication,
design, and testing infrastructure capability for the new and growing field of
microelectromechanical systems (MEMS). MEMS devices are emerging as product
performance differentiators in both commercial and defense markets such as
automotive, aerospace, medical, industrial process control, electronic
instrumentation, office equipment, appliances, and telecommunications.
Integrated circuit technology (IC) has brought unprecedented computational
power ever closer to the point of use. MEMS enables the development of smart
products by providing the required interface between the available
computational power and the physical world through the perception and control
capabilities of sensors and actuators.
- OptiSwitch Technology Corp. (OTC)
- OptiSwitch Technology Corp. specializes in design, fabrication, and testing of high power semiconductor devices and optical systems using TSUPREM-4, MEDICI, SPICE, and ZEMAX models. Foundry services, available for up to 4-inch wafers with thicknesses up to 3000 microns, include double sided photolithography, POCl3 and BBr3 liquid source doping, high temperature diffusion, oxidation, wide range of wet processes, and aluminum metallization up to 25 microns. Metrology services include thin-film thickness measurement, 4-point probe measurement, C-V/C-T measurement, minority carrier lifetime and iron contamination mapping.
- Preciseley Microtechnology Corporation
- Preciseley provides design, modeling/simulation and optimization of
Optical MEMS devices, as well as microfabrication process development
and device prototype.
- Protochips, Inc.
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Protochips supplies design and fabrication services targeting the
university, research, small-company and start-up markets. Our prototyping
services are tailored to meet the needs of individual customers. We perform
process development and fabrication, from small samples to 6" wafers, in a
well-supported and professionally-managed cleanroom environment. Our
materials experience includes silicon, GaAs, glass / quartz, polyimide,
polysilicon, silicon nitride, spin-on-glass, and a variety of metals.
- Protron Mikrotechnik
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Provides design, development, and manufacturing of customer-specific
MEMS. Capabilities include high aspect ratio silicon etching (Bosch-
and cryo-process) and standard MEMS technologies. Main application
fields are micro-fluidic systems, micro-optical devices (e.g. glas
fiber coupler), and silicon tools for injection molding and hot
embossing processes.
- QUALCOMM MEMS Technologies
- QUALCOMM MEMS Technologies (QMT) is bringing a revolutionary reflective
flat-panel display (iMoD) to the consumer market. Using MEMS technology,
iMoD displays employ interference! to generate color, providing a
low-power, low-cost, color display without the use of a color filter,
liquid crystal or TFT back-plane. QMT has facilities in Campbell, CA,
San Diego, CA and Hsinchu, Taiwan.
- Quantum Matrix Sdn Bhd
- Our solutions range from component to module level manufacturing.
Our major focus is on automotive, medical and mobile applications.
Our services include contract manufacturing services as well as sensor
packaging solutions.e
- Rogue Valley Microdevices
- Quick turnaround film deposition on wafer sizes up
to 200mm. Rogue Valley Microdevices can provide you with high quality
oxide and nitride films in our class 100 cleanroom.
- Semiconductor Complex Limited, India
- Every VLSI engineered at SCL holds the story within itself. Perhaps because it is not just getting manufactured in a plant but is born in a sensitive environment, where men and machines are all geared towards achieving excellence.
SCL was set-up in 1983, in the green, unpolluted environs on the outskirts of Chandigarh - a city designed by the French architect Le Corbusier, just 250 kms northwest of the India's capital New Delhi. SCL is a wholly owned Govt. of India Enterprise. With its objective to design, develop and manufacture VLSI circuits and VLSI based systems and sub systems, and to create a strong R&D base, SCL entered into a technical collaboration with American Microsystems Inc. USA and in 1984 commenced commercial production in 5 micron CMOS technology. Through intensive in-house R&D efforts SCL developed and brought into production the next generation 3 micron, 2 micron, 1.2 micron, 0.8 micron CMOS as well as EEPROM and CCD technologies. Latest addition to its capability is the newly established state-of-the-art MEMS Fab facility.
- Semicore Equipment, Inc.
- Vacuum coating systems. New, Remanufactured & Used (Pre-owned) systems for the MEMS and High-Tech Industries. Solutions to meet both your process and budget needs. Thin Film Coating Service and Process Development.
- Silex Microsystems
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Offers design, development and volume manufacturing of MEMS components
primarily for customers in the telecommunication and life science
markets. Specialties include bulk micromachining with etching,
V-groove and DRIE, anodic, fusion, adhesive and solder bonding,
surface micromachining with multilayer polysilicon, polyimide/BCB
dielectrics for RF applications, and electroplating and electroless
bumping of gold, nickel and solder tin. Components are developed and
fabricated in state-of-the-art class 10-10000 cleanrooms using 4", 6"
and 8" diameter wafers.
- Silicon Quest
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CMP and oxidation services.
- Simyx Technologies Co. Ltd
- SIMYX Technologies is a MEMS package design
and development company located in Shanghai China. Our OCQFN package is well
suited for Pressure Sensors, Accelerometers, Gyroscopes and Image Sensors.
- SiWave, Inc.
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A leading MEMS contract manufacturing and technology
company, specializing in design, fabrication, packaging and
productization services for the MEMS, Optics, Photonics, and
Nanofabrication Markets.
- THAT Corporation
- Offers precision silicon wafer grinding and polishing
at its state-of-the-art CMP Center. The Center routinely grinds and
polishes wafers to submicron TTV for THAT's internal use, and is fully
capable of providing the extremely tight tolerances needed for bonded
wafer, dielectric isolation, MEMS, optical devices, and other precision
technologies.
- THINFILMS, Inc.
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Offers a wide range of thin film foundry services such as coatings by
sputtering and evaporation, dry etching using ion milling and RIE, wet
etching and substrate dicing.
- Translume, Inc.
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Translume offers micromachining of fused silica and other materials
using proprietary ultrafast laser and etching processes. Translume can
provide optical and opto-mechanical design assistance, prototype
development, and electro-mechanical integration.
- Tronics Microsystems
- Custom MEMS contract manufacturer offering foundry services and turn-key product development, manufacturing, assembly, packaging and testing.
Production of custom products: smart sensors, BioMEMS and Microfluidics, Optical MEMS and RF MEMS. Leadership for MEMS manufacturing with thick SOI DRIE bulk micromachining, and specific expertise in wafer stacking (eutectic, thermo-compression, anodic, SDB fusion bonding), and vacuum / wafer level packaging.
Tronics offers product platforms for custom capacitive accelerometers and gyros, and ultra-miniature capacitive pressure sensors.
- Unitive, Inc.
- One of the world's leading providers of wafer-level packaging, Unitive is dedicated to making semiconductors smaller, faster and lighter. With
manufacturing facilities in Research Triangle Park, NC, and Hsinchu, Taiwan,
Unitive partners with customers to meet their specific needs through innovative deployment of technologies, designed to speed time-to-market and lower
costs. Unitive services include multi-level passivation and thin film
wiring, solder bumping and chip scale packaging. Unitive is a subsidiary of Amkor Technology, Inc. one of the world's largest providers of contract
semiconductor assembly and test services.
- University of Michigan Solid-State Electronics Laboratory
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With our fabrication knowledge, experience and C-MOS capability we can
offer a wide range of services (development, training, lithography,
deposition, doping, bonding, dicing, metrology, etc.). Our staff is
highly disciplined and dedicated to the quality and quick turn around
time of your product.
- Verimetra
- VTI Technologies
- VTI Technologies is a world leader in the design and manufacture of motion and pressure sensors. Our extensive experience in demanding applications for the automotive industry and high-volume production places strict quality demands also on sensors we produce for other industries.
Unlimited scope of applications
Sensors designed and manufactured by VTI Technologies measure acceleration, motion, shock, vibration, inclination and pressure. The application areas of our solutions range from the automotive industry and other moving machinery to a wide range of terminal devices, medical equipment manufacture and the sports and leisure industries.
- Washington Technology Center - Microfabrication Lab
- The Washington Technology Center (WTC) hosts the Pacific Northwest's
largest public micro fabrication laboratory. The lab is a critical
research and development facility for primary-stage product development
and product manufacturing. Some of the technology developed in our lab
includes fiber optic medical imaging and micro miniature retinal
scanning displays.
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MEMS and Nanotechnology Clearinghouse