| - ASM International
ASM International is the society for materials engineers and scientists, a worldwide network dedicated to advancing industry, technology, and applications of metals and materials.
The MEMS Materials Database is a comprehensive and authoritative new source for the mechanical, physical and chemical properties of materials appropriate to the range of MEMS Packaging challenges facing device designers. - Peter T. Jones, Berkeley Database
- A database of mechanical properties of polycrystalline silicon.
Also a collection of references for papers written since 1980 that
report the mechanical properties of polycrystalline silicon is now
available on the The Berkeley
Sensor and Acuator Center
http://bsac.eecs.berkeley.edu
web site. There is also a collection of
papers that report devices made by surface micromachined
polycrystalline silicon.
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MEMS and Nanotechnology Clearinghouse